On October 31, 2024, the location of the CHIPS for America Extreme Ultraviolet (EUV) Accelerator, an NSTC facility (EUV Accelerator) was announced within the NY CREATES Albany NanoTech Complex. Natcast, the purpose-built, non-profit entity designated by the Department of Commerce to operate the National Semiconductor Technology Center (NSTC), will be the operator of the EUV Accelerator
The goals of the EUV Accelerator include:
- Advancing state-of-the-art EUV lithography and tooling
- Expanding collaborative R&D between NSTC Membership and other partners
- Attracting global semiconductor leaders and academic collaborators
- Creating high-tech jobs and bolstering workforce development
- Driving U.S. semiconductor sector investment
The EUV Accelerator brings together stakeholders from across the ecosystem to accelerate semiconductor R&D and innovation by providing NSTC Members access to technologies, capabilities, and critical resources, including:
- Access to EUV technology to facilitate a wider range of research and a path to commercialization, including technologies with the most challenging feature sizes
- Dedicated space for Natcast researchers and staff as well as Member assignees to conduct research and collaborate in the facility
The EUV Accelerator has been operational as of July 1, 2025 and currently provides access to ASML’s standard numerical aperture EUV lithography system (the 0.33 NA tool). Access to ASML’s High NA EUV TWINSCAN EXE:5200B lithography system (the 0.55 NA tool) is anticipated for late 2026.
Submit your project proposal
NSTC Core Members are eligible to leverage the EUV Accelerator. Submit your project proposal using the link below. Natcast will review all proposals, reach out for any additional information, and provide a project SOW and cost quote.
Questions?
Email us at [email protected]
Learn more about NSTC Membership and collaboration opportunities
We’re hiring!
We are hiring a world-class team of technologists, engineers, leaders, communicators, and administrators who are passionate about the mission of providing U.S. leadership in the industries of the future – including at the EUV Accelerator. Learn more and join us: