PFAS Reduction and Innovation in Semiconductor Manufacturing (PRISM)

The goal of the National Semiconductor Technology Center (NSTC) PFAS Reduction and Innovation in Semiconductor Manufacturing (PRISM) program is to enhance the environmental sustainability of semiconductor manufacturing by addressing the challenges posed by per- and polyfluoroalkyl substance (PFAS) usage. Bringing greater environmental sustainability to semiconductor manufacturing is critical, but it is also a complex and costly process. To accelerate this transition, the PRISM program seeks to leverage collaborative research and development efforts from across the semiconductor supply chain and ecosystem, engaging industry experts, academic researchers, national laboratories, startups, government agencies, civic society, and other stakeholders within the community. By focusing on realistic solutions and key knowledge gaps in analysis, sensing, abatement, and modeling, the industry can rapidly address the challenges posed by PFAS usage.

THE CHALLENGE

Current methods for quantifying and identifying PFAS in semiconductor waste emissions are insufficient; the application of existing PFAS capture and destruction technologies to semiconductor-specific applications are still being thoroughly tested; and models to predict release and transformation reactions of PFAS in semiconductor waste are still in development stages. The challenge will be to define and develop comprehensive solutions and tools that can be rapidly implemented across the industry. To ensure long-term viability, the industry must better understand PFAS emissions from fabs and proactively investigate potential treatment techniques to minimize PFAS occurrence in fab waste, as this class of compounds is critical to semiconductor manufacturing.

THE OPPORTUNITY

The objective of the PRISM program is the successful creation of end-to-end PFAS mitigation capabilities, integrating advanced analytical methods, abatement technologies, and predictive modeling to address the environmental impact of PFAS usage in semiconductor manufacturing. A critical feature of the program is that each task area can have a measurable and substantial impact on PFAS emissions without altering process technology in production today. New chemistries or process equipment require years of development before they can be implemented into an existing process and it can be cost-prohibitive to modify mature process technology, further limiting the near-term impact. The four main task areas for both wastewater and air, include:

  • Analysis: Developing novel techniques or optimizing existing methods for identifying and quantifying PFAS in fab waste emissions. By analyzing samples from various fab processes, researchers will create comprehensive datasets of PFAS sources and emissions.
  • Sensing: Assessing the viability of novel sensor and device technology to measure PFAS in wastewater and air emissions to develop real-time monitoring capabilities.
  • Abatement: Evaluating existing PFAS abatement, capture, and destruction technologies to determine their effectiveness in semiconductor waste management systems. Comprehensive total cost of ownership (TCO) and life cycle assessments (LCA) will also be conducted to evaluate the financial and operational implications of adopting and scaling these technologies to accelerate future implementation.
  • Modeling: Providing recommendations for updating environmental characterization guidelines for semiconductor equipment. Researchers will also calibrate and validate existing PFAS release models and develop new models as needed to predict PFAS degradation pathways during fab processes and abatement environments.

A successful program will demonstrate the creation of a complete and comprehensive set of tools and methodologies from multiple teams to rapidly assess and mitigate PFAS emissions within semiconductor fabs.

By coordinating research across the semiconductor ecosystem, Natcast aims to accelerate the development and implementation of effective PFAS control solutions and make them broadly accessible to NSTC members. This integrated approach will provide NSTC members with the tools and knowledge needed to adopt data-driven strategies for managing PFAS, ensuring compliance with environmental regulations, reducing harmful emissions, and supporting the seamless adoption of new technologies. Further, NSTC members will be able to utilize and tailor these solutions within their own facilities or in collaboration with other facilities to drive new technologies from low to high technology readiness levels in an accelerated time frame.

FUNDING OPPORTUNITY

Total program award funding up to $35M with 8-15 awards anticipated. Individual awards are expected to range from $250K to $8M depending on the project complexity and number of task areas addressed.

GENERAL ELIGIBILITY

Eligible applicants include domestic for-profit organizations, non-profit organizations, and accredited institutions of higher education.

While entities are not required to be NSTC members at the time of application, Natcast will work with each awardee so they can become an NSTC member at the time of Award. Learn more about the benefits of becoming an NSTC member and apply here.

More information will be available in the full Call for Proposals (CFP) when posted next month.

Application Timeline

MilestoneDate
Informational WebinarNov. 4, 2024*
(3:00 p.m. ET)
Call for Proposals ReleasedNov. 8, 2024*
(12:00 p.m. ET)
PRISM Proposers' DayNov. 19, 2024*
Concept Paper DueDec. 4, 2024*
(5:00 p.m. ET)
Full Proposal DueJan. 20, 2025*
(5:00 p.m. ET)
*target

QUESTIONS?

Questions can be submitted to [email protected]. Responses to frequently asked questions will be posted to this PRISM website page.